Photocurable nanoimprint lithography was used to replicate an array of Fresnel zone plates onto a SiO2 substrate. This array was transferred into the substrate and used for zone-plate-array lithography (ZPAL). The experimentally determined point-spread function showed good agreement with simulation. The authors also demonstrate the use of ZPAL as a tool for patterning and replicating diffractive optics. (c) 2006 American Vacuum Society.