Silica nanoparticle/mesoporous silica composite films were prepared by direct mixing with mechanical stirring and thermal imidization. The structural morphology was elucidated by scanning electron microscopy and the surface of the film was imaged by atomic force microscopy. The functional groups and desorption process of the films were elucidated by Fourier transform infrared spectroscopy and thermal desorption spectroscopy. The mechanical properties were investigated using a nanoindenter system. The gel matrix and the filler are very compatible because they have similar molecular content. The composite films had a higher mechanical strength than pure porous silica film. Their strength is related to the silica nanoparticle content. The interfacial compatibility, dispersion effect, and interfacial strength also affect the mechanical strength of composite films. (c) 2006 Elsevier Inc. All rights reserved.