The fabrication process and electrochemical characterization of a miniaturized PEM fuel cell with silicon separators were investigated. Silicon separators were fabricated with silicon fabrication technologies such as by photolithography, anisotropic wet etching, anodic bonding and physical vapor deposition (PVD). A 400 mu m x 230 mu m flow channel was made with KOH wet etching on the front side of a silicon separator, and then a 550 nm gold current collector and 350 nm TiNx thin film heater were respectively formed on the front side and the opposite side by PVD. Two separators were assembled with the membrane electrode assembly (MEA) having a 4 cm 2 active area for the single cell. With pure hydrogen and oxygen under atmospheric pressure without humidification, the performance of the single fuel cell was measured. A single cell operation led to generation of 203 MW cm(-2) at 0.6 V at room temperature, which corresponded to 360 mW cm(-3) in terms of volumetric fuel cell power density, with 20 ccm of gas flow rate of hydrogen and oxygen at the inlet. (c) 2006 Elsevier B.V. All rights reserved.