Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.24, No.4, 1151-1151, 2006 DOI10.1116/1.2209658 Export Citation Surface roughness in XeF2 etching of a-Si/c-Si(100) (vol 23, pg 126, 2005) Stevens AAE, Beijerinck HCW Please enable JavaScript to view the comments powered by Disqus.
