화학공학소재연구정보센터
Thin Solid Films, Vol.506, 729-733, 2006
Particle modeling of non-collisional heating in inductively coupled argon plasmas
The effect of non-collisional heating on inductively coupled argon plasma is examined using the particle modeling. The effect is clarified by comparing the plasma densities obtained using two types of plasma current; one is the warm current directly sampled from the velocities of electrons and the other is the cold current given by Ohm's law. The calculation is performed for gas pressure 1-20 mTorr. It is found that the influence of non-collisional heating increases as the pressure decreases. Use of Ohm's law is found to give an overestimate of the plasma density under the condition of a constant power deposition. (c) 2005 Elsevier B.V. All rights reserved.