Transparent conductive Cd3TeO6 thin films were deposited by radio-frequency magnetron sputtering using a target composed of CdO and TeO2 powders, and these films' electrical and optical properties were examined. The electrical resistivity of 1.9 x 10(-2) Omega cm and an average transmittance above 85% in the visible region (400-800 nm) were obtained after annealing the film at 500 degrees C. The film's carrier density and Hall mobility were 8.7 x 10(19) cm(-3) and 6.8 cm(2) V-1 S-1, respectively. The absorption edge of the films was shifted to a lower wavelength by increasing the carrier density. The maximum band gap of these films was found to be 3.69 eV. (c) 2006 American Vacuum Society.