Cylindrically and pentagonally shaped three-dimensional (3-D) alumina nanotemplates were fabricated by electrochemical anodization of high purity aluminum. Crack-free 3-D nanotemplates were achieved by anodizing various aluminum pre-formed structures through their concave surfaces. A critical parameter for obtaining crack-free 3-D nanotemplates was manipulating the stress at the aluminum/aluminum-oxide interface, because tensile stress at this interface can cause radial cracks. Two different cathode configurations were used to produce 3-D nanotemplates: inner and outer cathode configuration. The outer cathode configuration allowed fabrication of 3-D alumina templates with smaller diameters (< 500 mu m) and the inner cathode configuration allowed fabrication of 3-D alumina templates with larger diameters (> 500 mu m). A larger pore density was observed at the inner surface of 3-D template than at the outer surface due to the curvature of the template. The pore diameter of alumina nanotemplate was strongly depended on the applied current density. No defect was observed independent of anodizing solutions and applied current density. This cost-effective and manufacturable method can be utilized for preparation of hierarchical nanostructures. (c) 2005 Elsevier Ltd. All rights reserved.