폴리머 마이크로렌즈 제작

류근걸; 김영근; 전광석; Kunkul Ryoo; Younggeun Kim; Kwangseok Jeon

Clean Technology, Vol.11, No.4, 205-211, December, 2005

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폴리머 마이크로렌즈 제작

Polymer Microlens Fabrication

류근걸, 김영근, 전광석^†

순천향대학교 공과대학 신소재공학과, 아산 336-745

Kunkul Ryoo, Younggeun Kim, and Kwangseok Jeon^†

Advanced Material Engineering, SoonChunHyang University, Asan 336-745, Korea

E-mail:

초록

마이크로렌즈 어레이의 제작은 매우 다양한 재료와 방법이 제안되어 지고 있으나, 폴리머를 이용한 사출법은 광학적 특성, 내충격성, 가공성, 경량화 및 환경친화성 등의 장점으로 주목 받고 있다. 사출법 템플레이트를 제작하기 위한 PR(Photo-Resist) reflow법은 형상제어가 용이하고 대랑생산과 정밀가공의 측면에서 효율적이어서, 집적화가 용이하고 공정을 줄일 수 있는 장점을 갖게 되어 매우 환경친화적이다. 그러나 마이크로렌즈 어레이의 사출성형은 사용되는 폴리머재료의 성질에 따라 성형에 어려움이 있는 것으로 알려져 있다. 본 연구에서는 이와 같은 성형의 어려움을 극복하기 위한 방법으로 급가열/급냉각 사출을 통하여 마이크로렌즈 어레이를 제작하고 특성을 이해하였다. 템플레이트의 급격한 온도상승과 고온에서의 모양이 냉각으로 인한 변형이 없도록 급속히 냉각시켜 줌으로서 마이크로렌즈 어레이의 사출성형을 구현 하였다. PC(Polyl-Cabon ate)와 PMMA(Poly-Methyl-Meth-Acrylate)를 비교하여, PMMA가 낮은 용융점에 의해 성형성이 우수함을 확인하였다. 사출시 압력과 속도를 변수로 마이크로렌즈 어레이의 제작을 위한 사출조건을 도출하였다.

There have been many technologies and materials proposed for realizing microlens array, and plastic injection is recognized as the most promising one because of several merits such as optical properties, impact resistance, formability, lightening and environmental adaptability. Since PR reflow for injection template fabrication enables the lens shape control easier, and the sample technology more effective for mass production, it lowers the cost, enhances integration, and reduces process steps, which leads to be environmentally benign. However injection of polymers may face the difficulty of formability depending on their properties. In order to overcome the difficulty, fast heating/cooling technology was introduced in this study, and microlenses were fabricated and evaluated. template obtained by PR reflow method was heated and cooled fast during injection to fabricate microlens array. PC and PMMA polymer materials were compared, and it was realized that PMMA showed much better formability due to its lower melting temperature. Injection parameters of pressures and velocities were driven out for injection optimization.

Keywords:PR reflow;Injection;Plastic;Microlens array;environmentally benign;fast heat/cool

[References]

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Lesem LB, Hirsch PM, Jordan JA, IBM J. Res. Develop., 13, 150155 (1969)
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Kim YS, Kim J, Choe JS, Roh YG, Jeon H, Woo JC, IEEE Photonics Technol. Lett., 12, 507 (2000)
Ostemayer FW, Kohl PA, Burton RH, Appl. Phys. Lett., 43, 642 (1983)
Tayler, Francis, Opt. Eng., 33, 3547 (2001)
Steingrer R, Fers M, Microelectron. Eng., 53, 539 (2000)
WAkaki M, Komachi Y, Kanai G, Appl. Optics, 37, 627 (1998)
Gale MT, Knop K, SPIE, 398, 347 (1983)
Fu Y, Bryan NK, IEEE Trans. Semicond. Manuf., 15, 229 (2002)
Fu Y, Ngoi BKA, Opt. Eng., 40, 511 (2001)
MacFarlane DL, Narayan V, Cox WR, Chen T, Hayes DJ, IEEE Photonics Technol. Lett., 6(6), 1112
Hayes DJ, Cox WR, "Micro-jet printing of polymers for electronics manufacturing", Adhesive Joining and Coating Technology in Electronics Manufacturing, pp. 168∼173 (1998)
Popovic ZD, Sprague RA, Neville Connell GA, Appl. Optics, 27, 1281 (1988)
문성욱, 김희연, 센서학회지, 10(6), 279
Suleski TJ, O'Shea DC, Appl. Optics, 34, 7507 (1995)
Peake GM, Sun SZ, Hersee SD, J. Electron. Mater., 26, 1134 (1997)
Sasaki A, Baba T, Iga K, Jpn. J. Appl. Phys., 31, 1611 (1992)

[1] Tuantranont A, Bright VM, Zhang J, Zhang W, Neff JA, Lee YC, Sens. Actuators, 91, 363 (2001)

[2] Lesem LB, Hirsch PM, Jordan JA, IBM J. Res. Develop., 13, 150155 (1969)

[3] Mihailov S, Lazare S, Appl. Optics, 32, 6211 (1993)

[4] Kubo M, Hanabusa M, Appl. Optics, 29, 2755 (1990)

[5] Jay TR, Steen MB, "Preshaping photoresist for refractive microlens fabrication," in Proc. SPIE,, p. 275 (1993)

[6] Lin Y, Pan C, Lin K, Chen S, Yang J, Yang J, "Polymide as the pedestal of batch fabricated micro-ball lens and micro-m ushroom array," Micro Electro Mechanical sy stems, 2001 The 14th IEEE International Conference, pp.337-340 (2001)

[7] Kim YS, Kim J, Choe JS, Roh YG, Jeon H, Woo JC, IEEE Photonics Technol. Lett., 12, 507 (2000)

[8] Ostemayer FW, Kohl PA, Burton RH, Appl. Phys. Lett., 43, 642 (1983)

[9] Tayler, Francis, Opt. Eng., 33, 3547 (2001)

[10] Steingrer R, Fers M, Microelectron. Eng., 53, 539 (2000)

[11] WAkaki M, Komachi Y, Kanai G, Appl. Optics, 37, 627 (1998)

[12] Gale MT, Knop K, SPIE, 398, 347 (1983)

[13] Fu Y, Bryan NK, IEEE Trans. Semicond. Manuf., 15, 229 (2002)

[14] Fu Y, Ngoi BKA, Opt. Eng., 40, 511 (2001)

[15] MacFarlane DL, Narayan V, Cox WR, Chen T, Hayes DJ, IEEE Photonics Technol. Lett., 6(6), 1112

[16] Hayes DJ, Cox WR, "Micro-jet printing of polymers for electronics manufacturing", Adhesive Joining and Coating Technology in Electronics Manufacturing, pp. 168∼173 (1998)

[17] Popovic ZD, Sprague RA, Neville Connell GA, Appl. Optics, 27, 1281 (1988)

[18] 문성욱, 김희연, 센서학회지, 10(6), 279

[19] Suleski TJ, O'Shea DC, Appl. Optics, 34, 7507 (1995)

[20] Peake GM, Sun SZ, Hersee SD, J. Electron. Mater., 26, 1134 (1997)

[21] Sasaki A, Baba T, Iga K, Jpn. J. Appl. Phys., 31, 1611 (1992)