Hot-wire chemical vapor deposition (HWCVD) of polymers affords the ability to coat objects of complex shape and nanoscale features. Using hot filaments to drive the gas phase chemistry has enabled the deposition of true linear polymers rather than the highly cross-linked organic networks typically associated with plasma enhanced CVD. The HWCVD method is particularly valuable for creating ultrathin layers of insoluble polymers, such as polytetrafluoroethylene (PTFE, Teflon-TM) and polyoxymethylene (POM, Delrin-TM). Additionally, organosilicon polymers, fluoroorganosilicon copolymers, and vinyl hydrocarbon polymers have all been demonstrated by HWCVD. The object to be coated remains at room temperature, promoting the required adsorption of film forming species. (c) 2005 Elsevier B.V. All rights reserved.