Three kinds of near-field microscopy imaging mode including SEAM (Scanning electron acoustic microscopy), PFM (Piezoresponse force microscopy) and SPAM (Scanning probe acoustic microscopy) have been developed to investigate domain structures of ferroelectric ceramics, crystals and thin films in our studies. The domain imaging mechanisms are presented individually in three imaging modes. Sub-surface micro-domain configuration of ferroelectric BaTiO3 ceramics and single crystal and their dynamic behavior under external fields were clearly visualized by SEAM. Ferroelectric domain structures of ferroelectric PZT thin film and PMN-PT single crystal were characterized by PFM. Nanoscale switching behavior and local field-induced nanoscale displacement behavior of domain structures in ferroelectric thin film were studied by PFM. Antiparallel domain patterns in ferroelectric transparent PLZT ceramics were also characterized by SPAM. The combination of SEAM, PFM and SPAM in application to imaging domain structures undoubtedly enrich our understanding of the nature of piezoelectricity and ferroelectricity at submicro-, even nano-meter scale. (c) 2006 Springer Science + Business Media, Inc.