LiPON films were deposited using radio-frequency magnetron sputtering in a pure N-2 gas atmosphere. The influence of rf power, N-2 pressure, target-substrate distance and target density on thin film composition and ionic conductivity has been studied. Impedance measurements performed between 25 and 80 degrees C have indicated that ionic conductivity increases with nitrogen incorporation into the glass structure. An increase in the deposition rate with the target density has also been observed. (c) 2005 Elsevier B.V. All rights reserved.