We describe a scanning probe instrument which integrates ion beams with the imaging and alignment function of a piezoresistive scanning probe in high Vacuum. The beam passes through several apertures and is finally collimated by a hole in the cantilever of the scanning probe. The ion beam spot size is limited by the size of the last aperture. Highly charged ions are used to show hits of single ions in resist, and we discuss the issues for implantation of single ions. (c) 2005 American Vacuum Society.