화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.24, No.1, 9-19, 2006
Free molecular background flow in a vacuum chamber equipped with two-sided pumps
Spacecraft propulsion systems, such as Hall thrusters, are designed and tested in large vacuum chambers. The Pumping capacity of modern facilities makes it possible to maintain pressures as low as 10(-3)-10(-4) Pa. One fundamental concern for the vacuum chamber is the facility effects oil the chamber performance. In this study, several free molecular models are developed to analyze the rarefied background flow inside a vacuum chamber equipped with two-sided vacuum pumps. These models lead to various sets of analytical results including velocity distribution functions for the background flow and formulas to compute the vacuum pump sticking coefficient. These results can be used to evaluate the performance of vacuum chambers and to aid constructing proper background flows for particle simulations of these systems. The results indicate that the background flow conditions can have a significant nonzero mean velocity and cannot be considered to be described by a Maxwellian velocit distribution. The models are applied to analyze the rarefied background flow in a specific vacuum chamber. Calculations of the sticking coefficient for flow of xenon in the vacuum chamber yield values close to 0.40 for cryogenic pumps. Several modifications of the background flow treatment for particle simulations are proposed with the aid of these analytical results. (c) 2006 American Vacuum Society.