Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.23, No.5, 2218-2221, 2005 DOI10.1116/1.2009771 Export Citation Modeling of the influence of dielectric target on interface sheath characteristics in a radio-frequency magnetron sputtering Kuroiwa S, Mine T, Yagisawa T, Makabe T Please enable JavaScript to view the comments powered by Disqus.
