In this study, we examine the growth conditions for Pb0.92La0.08Zr0.4Ti0.6O3 thin films with a linear electro-optical response. Films grown on SrTiO3(100) substrate show good crystalline quality and surface smoothness, if deposited within a narrow range of substrate temperatures around 530 degrees C. Such films had a (002) rocking curve full width at half maximum less than 0.2 degrees, and a surface roughness less than 0.4 nm. Xray photoelectron spectroscopy analysis confirmed the absence of surface impurity phases and revealed a single oxidation state for Pb2+, Zr4+, and Ti4+ cations. Good crystalline quality and a smooth film surface are required for the use of these materials in optical device applications. (c) 2005 Elsevier B.V. All rights reserved.