Undoped and Mo ions doped TiO2 thin films were prepared by a sol-gel method on soda lime glass substrates. The obtained films were characterized by ultraviolet-visible spectroscopy, X-ray diffraction and atomic force microscopy. The heat-induced hydrophilicity of the film is enhanced by doping Mo(VI) ions. After being heated at 400 degrees C for 1 h, the 0.75 wt.% Mo(VI)-doped TiO2 film shows superhydrophilicity. (c) 2005 Elsevier B.V. All rights reserved.