The surface chemistry and nanotopography of low-density polyethylene (LDPE) were modified by downstream, inductively coupled, radio frequency (rf) Ar plasma without inducing surface damage. The extent of surface modification was controlled by the applied ion energy fluence, determined from the plasma ion density measured with a Langmuir probe. The treated LDPE surfaces were characterized by atomic force microscope (AFM) imaging, contact angle measurements, and X-ray photoelectron spectroscopy (XPS). Analysis of AFM surface images confirmed that topography changes occurred at the nanoscale and that surface damage was insignificant. Contact angle measurements demonstrated an enhancement of the surface hydrophilicity with the increase of the plasma power. XPS results showed surface chemistry changes involving the development of different carbon-oxygen functionalities that increased the surface hydrophilicity. Physical and chemical surface modification was achieved under conditions conducive to high-density inductively coupled rf plasma.