Diamondlike carbon (DLC) films, known for exhibiting attractive combination of properties, have been extensively studied in the recent past. The inherent, internal compressive stresses affecting their adhesion and their relatively low thermal stability above 400 degrees C are two major drawbacks preventing wide usage of these films. Carbide formers incorporated into the carbon network have the potential to stabilize the film structure, relax internal stresses and improve their performance. The present work focuses on the synthesis, structure and mechanical and tribological property characterization of Cr-containing nanocomposite DLC films. The films were synthesized using a plasma-enhanced hybrid chemical vapor and physical vapor deposition process in a discharge composed of a mixture of CH4 and Ar gases. The Cr content in the films varied up to 18 at.%. The film morphology and composition were characterized by scanning and transmission electron microscopy, X-ray photoelectron spectroscopy and nuclear reaction analysis. The mechanical and tribological behavior of the films was studied as a function of Cr concentration by conducting nanoindentation and pin-on-disc experiments, respectively. The results showed that the films can be either amorphous with dispersed metallic-like Cr (at low Cr content) or nanocomposite consisting of face-centered cubic metastable CrC natioparticles dispersed in the DLC matrix. Films with low Cr content (< 5 at.%) were found to possess similar tribological characteristics with those of pure DLC films. Incorporation of more Cr (> 12 at.%) results in larger chromium carbide particles that have an adverse effect on wear resistance. The films with the low Cr content offer the opportunity to combine the excellent tribological behavior with other desirable properties deriving from the presence of the second phase. (c) 2005 Elsevier B.V. All rights reserved.