Cerium-substituted bismuth titanate (Bi3.25Ce0.75Ti3O12 (BCT)) films were deposited on the Pt(111)/SiO2/Si(100) substrates by a liquid source misted chemical deposition technique. This film showed X-ray diffraction patterns that crystallization along the (006) direction was suppressed and did not contain any other oxides. The remnant polarization of this film increased with increase in annealing temperature. The 2P(r) and 2E(c) values of the BCT film annealed at 700 degrees C were 19.72 mu C/cm(2) and 357 kV/cm, respectively. 2P(r) value of this film decreased by less than 5% of the initial value after 7 x 10(9) read/write switching cycles at a frequency of 1 MHz. (c) 2005 Elsevier B.V All rights reserved.