Excimer laser crystallization of thin film amorphous silicon has become a key technology in manufacturing of high-resolution low-power consumption thin film transistor displays. Lambda Physik and its Beam Delivery Systems Department MicroLas are leading the efforts to develop complete laser-optical system solutions comprising uniformity, productivity and economic aspects of this UV-laser process. This paper will present latest achievements in high-power excimer laser and illuminator design to address the production requirements of thin film crystallization and will look at challenges to meet future requirements. (C) 2005 Elsevier B.V. All rights reserved.