SiO2-patterned anodic aluminum oxide (AAO) is fabricated on the surface of aluminum (Al) foil by combining both photolithography and anodizing technique. Tilted pores and ridge-like features on the Al surface are observed under the SiO2 mask by scanning electron microscopy characterization. A mechanism based on the deflection of electric field due to the existence of SiO2 barrier on Al surface has been proposed to explain the observed anodizing behavior. Moreover, large-scale ordered metallic Al patterns are also revealed by removing the AAO film and SiO2 mask. (c) 2005 The Electrochemical Society.