We fabricated Sr(Ti1-xVx)O-3 composition-spread films on SrTiO3 (100) substrates by using pulsed laser deposition in ultra high vacuum. Sharp metal-insulator (M 1) transitions were observed in the case of Sr(Ti1-xVx)O3-delta composition-spread films grown on an oxygen deficient SrTiO3 (STO) buffer/SrTiO3 (STO) substrate in the restricted composition x=0.5-1.0 while no MI transition was observed in the case of Sr(Ti1-xVx)O3-delta belowx=0.5. In the insulating phase below the MI transition, non-linear I-V characteristics were observed. To explain the appearance and disappearance of MI transitions in Sr(Ti1-xVx)O3-delta two possibilities were considered: (i) strain effect from the substrate and (ii) charge-transfer at the interface between Sr(Ti1-xVx)O3-delta and STO. (c) 2005 Elsevier B.V. All rights reserved.