The analysis of temperature effects on a single guided mode optical fiber coupled into a deposited layer planar waveguide is presented. The pressure effects are investigated through a Bragg grating structure. Using the transfer matrix and mode expansion propagation methods the characteristics of an integrated temperature and pressure sensors are performed. Two kinds of polymers are used as a planar waveguide materials. Employing the thermooptic effects of a polymer planar waveguide, the resonant wavelength of the device is very sensitive to ambient temperature. A relatively good agreement between our results obtained using rigorous approaches and those reported in the experiment is obtained. (c) 2005 Elsevier B.V. All rights reserved.