Thin Solid Films, Vol.480, 452-456, 2005
Fabrication of SnS2/SnS heterojunction thin film diodes by plasma-enhanced chemical vapor deposition
Heterojunction based on Sn-S compounds, SnS and SnS2, have been prepared by plasma-enhanced chemical vapor deposition (PECVD). The semiconductor materials SnS and SnS, were obtained by the decomposition of the gas precursors SnCI4 and HAS in a capacitive-coupled RF plasma-deposition chamber. Corning glass with a transparent conductor oxide (TCO) thin film was used as substrate. The structure of the diode was glass/TCO/n-type SnS2/p-type SnS/Al. The contact between the n-type and p-type Sn-S compounds was found to be rectifying. The estimate reverse saturation density current was 1.2 x 10(-5) A/cm(2). The ratio of forward-to-reverse current exceeded 300 within the range of applied voltages of -1.0 to 1.0 V and the estimated diode factor was 2.7. A photovoltaic effect was observed under illumination giving an open circuit voltage of 0.35 V and a small short circuit current density with a value of 1.5 mA/cm(2). (c) 2004 Published by Elsevier B.V.
Keywords:SnS2/SnS heterojunction thin film diodes;plasma-enhanced chemical vapor deposition;transparent conductor oxide