Organosilane self-assembled monolayers (SAMs) were micropatterned using standard photoresist-based lithographic and plasma etching techniques. Etched regions were backfilled with a second SAM containing a different organic substituent. By repeating the patterning process, a complex, multifunctional patterned surface composed of three different SAMs (amino-, methyl-, and thiol-terminated) was formed. Since two distinct etching steps are used, the backfilled SAMs can be deposited in trenches of different depths. Multifunctional, micropattemed SAMs were visualized by friction- mode scanning probe microscopy (SPM). Gold-coated SPM tips yielded high contrast friction images from surfaces patterned with thiol-terminated SAMs. (c) 2005.