화학공학소재연구정보센터
Chemical Engineering Journal, Vol.73, No.1, 61-66, 1999
Extension of the fluidized bed silicon CVD process to non-conventional operating conditions - Depositions on porous powders and or under reduced pressure
The applications field of the fluidized bed chemical vapor deposition process has recently been extended towards an important industrial sector: the elaboration of supported catalysts. This necessitates non-conventionnal operating conditions, because depositions take place on porous powders, and under reduced pressure. With the aim to analyze the possible modifications induced by these new working conditions, some experiments, and then simulations have been done, using a well-known deposit, that of silicon from silane and disilane. The detailed analysis of results demonstrates the good applicability of this process to this kind of elaborations.