The adhesion behavior of an optically smooth poly(methyl methacrylate) (PMMA) thin film (100 nm in thickness) on different evaporated metal substrates has been investigated using a combinatorial method approach. In this investigation through high-throughput peel tests, the relationship between annealing time, annealing temperature, surface energy, and ultraviolet degradation to the film adhesion has been examined. In addition, atomic force microscopy, optical microscopy and Fourier transform infrared microspectroscopy techniques have been adopted to elucidate the observations on the adhesion behavior from the peel tests. The results of this study demonstrate that the proposed combinatorial approach to characterize the dependence of adhesion on adhesion-controlling parameters has the potential to assess various factors affecting the adhesion. Published by Elsevier Ltd.