This article presents the development of an innovative approach using the vacuum submerged arc machining with aid of enhanced ultrasonic vibration to manufacture nanoparticles. The Arc Spray Nanoparticle Synthesis System (ASNSS) previously designed by the NTUT's Nano Laboratory has been successfully developed to generate nanoparticles. In this proposed process, a titanium bar, as the electrode, is melted and vaporized in distilled water, used as an insulating liquid. Meanwhile, the ultrasonic vibration is applied to the electrode to remove the vaporized metal powders rapidly from the melting zone. The vaporized metal particles are then rapidly quenched by the designed cooling system, thus nanocrystalline particles nucleated and formed. This study discusses the the influence of the ultrasonic amplitude and various process variables such as pulse duration, peak current, and dielectric liquid temperature on TiO2 nanoparticles suspension. (C) 2005 Springer Science + Business Media, Inc.