A miniaturized electron-beam column has been developed for portable scanning electron microscope, which has greatly reduced size and weight compared with those of conventional electron-beam column, in order to satisfy the demands of new applications in surface analysis, inspection and metrology, electrical testing. For column miniaturization and high precision lens fabrication, we have constructed a ceramic lens integrated column system, in which all of the electro-optical elements are integrated in one ceramics. body. In this trial production, we use a newly developed alumina-based high resistive conductive ceramics for the optimization of this electro-static lens operation. All the lens electrodes are metalized and patterned on the inner surface of the cylindrical high resistivity conductive ceramic whose volume resistivity is 10(10) Omega cm. As the ceramic lens integrated column. used here integrates all the lens electrodes and manufactured in a consecutive process, the mechanical alignment error can be reduced, resulting in the concentricity of 0.7 mum, in whole column fabrication. The initial images demonstrate the basic operation of the ceramic lens integrated column system. (C) 2004 American Vacuum Society.