Journal of Vacuum Science & Technology B, Vol.22, No.6, 3509-3512, 2004
Dissolution behavior of main-chain-fluorinated polymers for 157 nm lithography
Tetrafluoroethylene-based copolymers with functionalized norbornenes are synthesized by using a fluorocarbon initiator. The effect of molecular weight on the dissolution behavior of five fluoropolymers in a standard alkaline developer is studied using the quartz crystal microbalance method and surface free energy measurements. It is observed that the dissolution rate decreases exponentially with increasing molecular weight for molecular weights under approximately 5000. Swelling is observed in the two polymers that have low surface free energy. (C) 2004 American Vacuum Society.