Sn-incorporated nanocomposite diamond like carbon (DLC) films were synthesized using direct current plasma enhanced chemical vapor deposition method. The precursorgas used was acetylene. For Sn incorporation, SnCl(2)(.)2H(2)O dissolved in methanol was used. Fourier-transform infrared spectroscopy measurements showed different vibrational modes of tetrahedrally bonded carbon and also some small peaks due to Sn-C bonding vibrations. Transmission electron microscopy image and electron diffraction patterns also confirmed the incorporation of nanocrystalline Sri particles into the amorphous DLC matrix. Due to the presence of Sri clusters, the Tauc gap of the films decreased sharply, compared to the intrinsic material. It was found that the resistivity of Sn-incorporated DLC films decreased drastically (by eight orders of magnitude) compared to the undoped DLC film. Also. the films exhibited good field emission properties at a lower turn-on field. (C) 2004 American Vacuum Society.