화학공학소재연구정보센터
Thin Solid Films, Vol.469-470, 495-499, 2004
NbS2 thin films by atmospheric pressure chemical vapour deposition and the formation of a new 1T polytype
Thin films of NbS2 have been deposited from the atmospheric chemical vapour deposition reaction of niobium pentachloride and 2-methyl-2-propanethiol and tert-butyldisulfide. 3R-NbS2 was produced from tent-buytl thiol whereas a new trigonal polytype 1T-NbS2 was deposited from tert-butyldisulfide. Films were grown on glass over a wide temperature range (250-600degreesC) and crystallinity was induced above 350degreesC. (C) 2004 Elsevier B.V. All rights reserved.