A new type of a electrochemical scanning probe microscope is presented. This technique uses a small capillary as a probe which is scanned over the sample surface. The capillary is filled with the electrolyte. With a counter and reference electrode attached from the rear side this constitutes a complete electrochemical cell. Therefore, there is no need to submerge the whole sample in the electrolyte. This new technique has the advantage that no contamination of the surface due to the electrolyte can take place because the sample is only exposed to the electrolyte at the relevant point. This electrochemical scanning capillary microscope has been used for the deposition of submicrometer-wide copper lines on gold and silicon crystals. Linewidths as small as 200 nm were obtained. The deposited copper structures were analyzed by means of energy-dispersive X-ray and Auger electron spectroscopy techniques. (C) 2004 The Electrochemical Society.