화학공학소재연구정보센터
Thin Solid Films, Vol.464-65, 286-289, 2004
CVD growth of single-walled carbon nanotubes using size-controlled nanoparticle catalyst
We investigated single-walled carbon nanotube (SWNT) growth using a novel Fe3O4 nanoparticle catalyst synthesized with a simple organic chemistry process. We characterized the structure of the grown SWNT's through scanning electron microscopy (SEM), atomic force microscopy (AFM) and microscopic Raman spectroscopy. Discrete nanoparticles with a uniform diameter of similar to 4 nm could be deposited on Si substrates with a thermal oxide layer by spin-coating with a nanoparticle solution. Nanoparticles prepared under optimum conditions remained discrete and uniform without aggregation even after chemical vapor deposition (CVD) process and their diameters were reduced to similar to 1.7 nm due to decomposition reactions during CVD. These nanoparticles were found to have remarkable catalytic activity in the CVD growth of the SWNTs. SWNTs with diameters of around 1 nm were produced from the reduced nanoparticle catalyst. The diameters of the grown SWNTs were closely correlated with those of the catalytic nanoparticles and tended to be slightly smaller than the particle size. (C) 2004 Elsevier B.V. All rights reserved.