Self-assembled nanostructure fabrication technology holds much potential to further the interests of nanoscience and nanotechnology. Using a low-energy mass-selected ion beam deposition system, we fabricated self-assembled silicon carbide (SiC) nanotiles. Methylsilicenium ions (SiCH3+) used as single precursors were generated from dimethylsilane (SiH2(CH3)(2)). Low-energy SiCH3+ ions (100 eV) were deposited on a Si(100) substrate at 500-600 degreesC. The characteristics of the self-assembled SiC nanotiles were analyzed by reflection high-energy electron diffraction (RHEED), a scanning electron microscope (SEM) and an atomic force microscope (AFM). The self-assembled SiC nanostructure displayed the properties of a zinc-blende structure (3C-SiC) and heteroepitaxial growth. The shape of the self-assembled SiC nanotiles was rectangular with an edge length of 150-200 nm and a height of 10-30 nm. Optimum temperature was found to be 600 degreesC due to the sensitivity of crystal quality and shape of the self-assembled SiC nanotiles to growth temperature. (C) 2004 Elsevier B.V. All rights reserved.