The new technique of micro-jet chemical vapor deposition was used to deposit hydrocarbon on a glass substrate kept at a short distance from a capillary injector. Acetylene gas was used as reactant and the decomposition was achieved via plasma excitation. Plasma was generated and sustained in a localized manner between two copper electrodes. This new technique is characterized by a high-deposition rate (hundreds of microns per second), a low spread (i.e. a high aspect ratio) and low-power input to the plasma (high efficiency). (C) 2003 Elsevier B.V. All rights reserved.