Pulsed laser sources are widely used for the micro-processing of materials from the structuring and patterning of surfaces to the direct machining of devices. This paper discusses laser micro-processing techniques for the fabrication of microstructures with high accuracy and precision over large areas. Techniques discussed include laser mask projection techniques, synchronised image scanning (SIS) and bow tie scanning (BTS) and direct beam micromachining. Examples of the application of these techniques in industrial production are discussed, including solar cell scribing, micro-optical device manufacture, inkjet printer nozzle drilling and plasma display panel patterning. (C) 2003 Elsevier B.V. All rights reserved.