In this work, a diagnostic method for solid layer analysis based on LIBS (laser induced breakdown spectroscopy) has been proposed for minimizing the damage on the sample surface. In this method the focus of laser is placed some millimetres distance from the target surface so that an air spark is generated close to the target surface. The particles are removed from the target mainly by air plasma etching instead of direct laser-solid interaction. In this way, it is not necessary to expose the target surface to high laser energy so that the damage on the sample is really superficial. Here preliminary results on a hard alloy as 25CrMo4 and on a sintered TiO tablet are shown. (C) 2003 Elsevier B.V. All rights reserved.