화학공학소재연구정보센터
Thin Solid Films, Vol.450, No.1, 14-22, 2004
Photomodulated reflectance and transmittance: optical characterisation of novel semiconductor materials and device structures
Photomodulation spectroscopy, in reflection and transmission modes, is presented here as a powerful non-destructive optical technique for the investigation of fundamental physical properties of new semiconductor materials and complex micro- and nano-structures. The abilities of photoreflectance and phototransmittance in application to many kinds of semiconductor structures are demonstrated. The following aspects are discussed: (1) separation of the optical response and built-in electric field determination in different depths of the sample by a selection of the pump beam wavelength; (2) electric field in delta-doped structures by an application of a fast Fourier transformation; (3) electron concentration dependence of the band gap related transitions in wurtzite GaN epitaxial layers; (4) comparison of different spectroscopic techniques used for investigations of InGaSb/GaSb quantum wells within 1.5-2 mum spectral region; (5) quantum well intermixing effects in InGaAsP/InP 1.55-mum laser structures; (6) photomodulation spectroscopy of self-assembled quantum dots. (C) 2003 Elsevier B.X. All rights reserved.