Proceedings of Symposium M on Optical and X-ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference, Strasbourg, France, June 10-13, 2003

Murtagh M; Ricote J; Chateigner D; Schreiber J

Thin Solid Films, Vol.450, No.1, 1-2, 2004

DOI10.1016/j.tsf.2003.10.039 Export Citation

Proceedings of Symposium M on Optical and X-ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference, Strasbourg, France, June 10-13, 2003

Murtagh M, Ricote J, Chateigner D, Schreiber J