Non-vacuum and PLD growth of next generation TCO materials

Ginley D; Roy B; Ode A; Warmsingh C; Yoshida Y; Parilla P; Teplin C; Kaydanova T; Miedaner A; Curtis C; Martinson A; Coutts T; Readey D; Hosono H; Perkins J

Thin Solid Films, Vol.445, No.2, 193-198, 2003

DOI10.1016/j.tsf.2003.08.008 Export Citation

Non-vacuum and PLD growth of next generation TCO materials

Ginley D, Roy B, Ode A, Warmsingh C, Yoshida Y, Parilla P, Teplin C, Kaydanova T, Miedaner A, Curtis C, Martinson A, Coutts T, Readey D, Hosono H, Perkins J

Transparent conducting oxides represent a key component in a number of important opto-electronic technologies. The demand for improved materials is increasing. It is increasingly important to develop improved materials and process techniques. We report on the PLD growth of both Mo doped In-O, an n-type material with enhanced mobilities, and p-type Ca-CuInO2, films with improved conductivity. In both cases, very high quality films have been obtained with improved opto-electronic properties. We also report on a solution based route to p-type Cu2SrO2 which has produced phase pure films. (C) 2003 Elsevier Science B.V. All rights reserved.

Keywords:laser ablation;oxides;solar cells;conductivity;indium oxide;copper oxide