화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.22, No.5, 2096-2100, 2004
Target system for fabrication and control of magnetic metal content in diluted magnetic semiconductors by pulsed-laser deposition
A synthesis method for control of magnetic metal content in diluted magnetic semiconductors prepared by pulsed laser deposition is presented. We developed a double target system composed of a disc-like semiconductor target and a wire metal target. This system has the advantage that the magnetic metal content is effectively controlled by changing the position of the lens focusing the laser beam. We synthesized Ni-doped ZnTe films using the target system and evaluated the Ni content and crystallinity of the films by electron probe micro analysis and x-ray diffraction. (C) 2004 American Vacuum Society.