The digital micromirror device (DMD) is one of the successfully commercialized devices in the emerging field of microelectromechanical systems. In this study, an atomic force microscope (AFM) was used to characterize the surface roughness and the adhesive forces of landing sites. Micromirror tilting measurements on the DMD chip were made using an AFM to obtain the force required to tilt the micromirror. An asperity contact model was used to analyze the contact area and contact stresses between the spring tip and the landing site. Nanoscale bending tests were conducted on the hinge to measure elastic modulus which was needed in the analysis. These data were used to understand the potential mechanisms for "soft" stuck micromirror occurrences. (C) 2004 American Vacuum Society.