Atomic force microscopy (AFM), scanning electron microscopy (SEM), white light imaging measurements, and Raman microscopy were employed for the characterization of hexahydro-1,3,5-trinitro-1,3,5-s-triazine (RDX) nanoparticles deposited on glass substrate surfaces. The RDX nanoparticles were prepared by exposure of glass substrate surfaces to an aerosol jet containing RDX. The spectroscopic signature of RDX particles and the two known forms of the material, beta and alpha RDX, are compared. Raman measurements reveal that RDX nanoparticles and beta deposits have similar spectroscopic signatures between 750 and 1000 cm(-1).