The surface diffusion characteristics of nonpolar perfluoropolyether (PFPE) Z on carbon surfaces are investigated in two regimes, submonolayer and multilayer, for nano-thin films. For the submonolayer regime, the two-dimensional, cubic van der Waals equation of state is applied to determine the dependence of the surface diffusion coefficient on the film thickness, as experimental surface diffusion coefficients increase with increasing film thickness. For the multilayer regime, a conventional fluid mechanics analysis with position dependent viscosity and a van der Waals disjoining pressure gradient is applied to investigate the surface diffusion characteristics. The present theoretical analysis qualitatively agrees with the experimental results.