Criteria for aerosol synthesis of soft-agglomerate, hard-agglomerate, or even nonagglomerate particles are developed on the basis of particle sintering and coalescence. Agglomerate (or aggregate) particles are held together by weak, physical van der Waals forces (soft agglomerates) or by stronger chemical or sintering bonds (hard agglomerates). Accounting for simultaneous gas phase chemical reaction, coagulation, and sintering during the formation and growth of silica (SiO2) nanoparticles by silicon tetrachloride (SiCl4) oxidation and neglecting the spread of particle size distribution, the onset of hard-agglomerate formation is identified at the end of full coalescence, while the onset of soft-agglomerate formation is identified at the end of sintering. Process conditions such as the precursor initial volume fraction, maximum temperature, residence time, and cooling rate are explored, identifying regions for the synthesis of particles with a controlled degree of agglomeration (ratio of collision to primary particle diameters).