Photolysis of perfluoroazooctane with diamond films led the chemical modification of the surface to introduce perfluorooctyl functional groups, confirmed by means of Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and time-of-flight secondary ion mass spectrometry measurements. Diamond films modified with fluorine moieties showed improved frictional property and reduction of surface energy, as evaluated by contact angle to water, compared with a pristine diamond film. The contact angle and friction coefficient of chemically modified diamond film are 118degrees and 0.1, respectively. The results of the value of the contact angle depending on irradiation times are consistent with those of the F/C ratio of fluorinated diamond films by monitoring with XPS.