Previous Article Next Article Table of Contents Journal of the Electrochemical Society, Vol.151, No.7, L5-L5, 2004 DOI10.1149/1.1762398 Export Citation Low resistance silicon-germanium contact technology for modular integration of MEMS with electronics (vol 151, pg J21, 2004) Eyoum MA, King TJ Please enable JavaScript to view the comments powered by Disqus.
