We prepared TiO2-SiO2 thin films with various TiO2/SiO2 ratios by sol-gel dip coating method and explored the dependence of their structural and optical properties on calcination temperature. The absorption peaks relevant to Si-O, Si-O-Ti and Ti-O bonds appeared in the FTIR spectra. With increasing TiO2 content, the intensity of Si-O bond peaks decreases and that of Ti-O bond peaks increases. The XRD results show that the temperature of transformation from amorphous to anatase phase is lowered as TiO2 content increases. The crystallite size of anatase phase in composite thin films increases with increasing TiO2 content and calcination temperature. At 1000degreesC, the mixed phase of anatase and rutile appears in the pure TiO2 thin films. The rutile films are denser than the anatase films. The increase in refractive index of composite thin films with calcination temperature is related to the decreased thickness and increased density as a result of evaporation of water and organic matters below 400degreesC. On the other hand, it is related to the change in the crystal phase and crystallite size of the films over 400degreesC. (C) 2004 Kluwer Academic Publishers.