Y2O3 nanoparticulate thin films have been prepared using an emulsion liquid membrane (water-in-oil-in-water (W/O/W) emulsion) system, consisting of Span 83 (sorbitan sesquioleate) as a surfactant and VA-10 (2-methyl-2-ethylheptanoic acid) as an extractant (cation carrier). Yttrium ions were extracted from the external water phase and stripped into the internal water phase to make precursor oxalate nanoparticles. Y2O3 nanoparticulate thin film was prepared by casting the W/O emulsion, separated from the external phase and containing the Y oxalate nanoparticles, on a Si substrate, followed by calcination in air. Well-arranged thin-layer nanoparticulate film, consisting of Y2O3 nanoparticles smaller than 20 mm, was obtained via spin coating of the W/O emulsion. A multilayer nanoparticulate thin film was also fabricated via a simple procedure of repeated coating and subsequent calcination. (C) 2004 Elsevier Inc. All rights reserved.